{"id":1841,"date":"2023-11-21T00:00:00","date_gmt":"2023-11-21T00:00:00","guid":{"rendered":"urn:uuid:9ef2e639-522c-4669-924b-50d6962776d9"},"modified":"2023-11-21T00:00:00","modified_gmt":"2023-11-21T00:00:00","slug":"ban-dao-ti-wei-xi-jia-gong-nojie-shuo-saito","status":"publish","type":"post","link":"https:\/\/www.sekaiken.com\/?p=1841","title":{"rendered":"\u534a\u5c0e\u4f53\u5fae\u7d30\u52a0\u5de5\u306e\u89e3\u8aac\u30b5\u30a4\u30c8"},"content":{"rendered":"<p>\u534a\u5c0e\u4f53\u5fae\u7d30\u52a0\u5de5\u306b\u3064\u3044\u3066\u53c2\u8003\u306b\u306a\u308b\u30b5\u30a4\u30c8\u304c\u3088\u3046\u3084\u304f\u898b\u3064\u304b\u308a\u307e\u3057\u305f\u3002\u660e\u65e5\u306e\u8b1b\u7fa9\u306b\u56f3\u3084\u52d5\u753b\u304c\u6b32\u3057\u304b\u3063\u305f\u306e\u3067\u52a9\u304b\u308a\u307e\u3057\u305f\u3002<\/p>\n<blockquote class=\"wp-embedded-content\" data-secret=\"H0i70GdmW2\"><p><a href=\"https:\/\/semiengineering.com\/\">Homepage<\/a><\/p><\/blockquote>\n<p><iframe loading=\"lazy\" class=\"wp-embedded-content\" sandbox=\"allow-scripts\" security=\"restricted\" style=\"position: absolute; visibility: hidden;\" title=\"&#8220;Homepage&#8221; &#8212; Semiconductor Engineering\" src=\"https:\/\/semiengineering.com\/embed\/#?secret=QcyPvWvlhQ#?secret=H0i70GdmW2\" data-secret=\"H0i70GdmW2\" width=\"500\" height=\"282\" frameborder=\"0\" marginwidth=\"0\" marginheight=\"0\" scrolling=\"no\"><\/iframe><br \/>\n\u5e83\u544a\u304c\u3042\u307e\u308a\u306a\u3044\u3053\u306e\u30b5\u30a4\u30c8\u304c\u3069\u3046\u3084\u3063\u3066\u53ce\u76ca\u3092\u4e0a\u3052\u3066\u3044\u308b\u306e\u304b\u4e0d\u601d\u8b70\u3067\u3059\u304c\u3001SPONSORS\u304c\u305f\u304f\u3055\u3093\u3042\u308a\u8cc7\u91d1\u3092\u3082\u3089\u3063\u3066\u3044\u308b\u306e\u304b\u3082\u3057\u308c\u307e\u305b\u3093\u3002\u6c42\u4eba\u306e\u30da\u30fc\u30b8\u306b\u305f\u304f\u3055\u3093\u8f09\u3063\u3066\u3044\u308b\u306e\u3067\u3001\u305d\u3053\u3067\u53ce\u76ca\u304c\u3042\u308b\u304b\u3082\u3057\u308c\u307e\u305b\u3093\u3002<br \/>\n\u5168\u3066\u306e\u30da\u30fc\u30b8\u304c\u82f1\u8a9e\u304b\u7c21\u4f53\u4e2d\u56fd\u8a9e\u306e\u9078\u629e\u306b\u306a\u3063\u3066\u3044\u308b\u306e\u304c\u307e\u305f\u4e0d\u601d\u8b70\u3067\u3059\u3002\u4e2d\u306e\u4eba\u306f\u7c73\u56fd\u30b7\u30ea\u30b3\u30f3\u30d0\u30ec\u30fc\u306e\u3088\u3046\u3067\u3059\u304c\u3001\u5927\u4e08\u592b\u3067\u3057\u3087\u3046\u304b\u3002<br \/>\nDUV(deep ultraviolet \u6df1\u7d2b\u5916\u7dda, \u901a\u5e38\u306fArF\u30a8\u30ad\u30b7\u30de\u30ec\u30fc\u30b6\u30fc\u306e\u6ce2\u9577193nm\u306e\u30b3\u30d2\u30fc\u30ec\u30f3\u30c8\u5149)\u30de\u30b9\u30af\u304b\u3089\u6ce2\u9577\u306e1\/10\u3084\u305d\u308c\u4ee5\u4e0b\u306e\u30d1\u30bf\u30fc\u30f3\u3092\u4f5c\u308b\u6642\u306b\u3069\u3046\u3059\u308b\u304b\u3001\u660e\u5feb\u306a\u8aac\u660e\u304c\u3042\u308a\u307e\u3057\u305f\u3002<br \/>\n\u30d1\u30bf\u30fc\u30f3\u306e\u7aef\u304c\u5149\u306e\u56de\u6298\u3067\u30dc\u30b1\u308b\u554f\u984c\u306f\u5e72\u6e09\u3092\u5229\u7528\u3057\u305f\u300c\u5149\u8fd1\u63a5\u52b9\u679c\u88dc\u6b63(optical proximity correction, OPC)\u3084\u300c\u4f4d\u76f8\u5dee\u30de\u30b9\u30af\u300d\u3092\u4f7f\u3046\u3053\u3068\u3067\u306a\u304f\u305b\u307e\u3059\u3002<br \/>\nhttps:\/\/en.wikipedia.org\/wiki\/Optical_proximity_correction<br \/>\nhttps:\/\/en.wikipedia.org\/wiki\/Phase-shift_mask<br \/>\n\u3057\u304b\u3057\u3001\u5143\u306e\u30d1\u30bf\u30fc\u30f3\u3088\u308a\u3082\u5c0f\u3055\u3044\u69cb\u9020\u3092\u4f5c\u308b\u306e\u306f\u96e3\u3057\u305d\u3046\u3067\u3059\u3002\u305d\u308c\u3092\u89e3\u6c7a\u3059\u308b\u306e\u304c\u3001self alignment double (\u307e\u305f\u306ftriple, quadruple) patterning (SAD(\u307e\u305f\u306fT,Q)P)\u3068\u547c\u3070\u308c\u308b\u65b9\u6cd5\u3067\u3059\u3002<\/p>\n<blockquote class=\"wp-embedded-content\" data-secret=\"YKw7dPTf23\"><p><a href=\"https:\/\/semiengineering.com\/self-aligned-double-patterning-part-one\/\">Self-Aligned Double Patterning, Part One<\/a><\/p><\/blockquote>\n<p><iframe loading=\"lazy\" class=\"wp-embedded-content\" sandbox=\"allow-scripts\" security=\"restricted\" style=\"position: absolute; visibility: hidden;\" title=\"&#8220;Self-Aligned Double Patterning, Part One&#8221; &#8212; Semiconductor Engineering\" src=\"https:\/\/semiengineering.com\/self-aligned-double-patterning-part-one\/embed\/#?secret=EJo6AuVehs#?secret=YKw7dPTf23\" data-secret=\"YKw7dPTf23\" width=\"500\" height=\"282\" frameborder=\"0\" marginwidth=\"0\" marginheight=\"0\" scrolling=\"no\"><\/iframe><\/p>\n<blockquote class=\"wp-embedded-content\" data-secret=\"0Ht0Dab9sH\"><p><a href=\"https:\/\/semiengineering.com\/self-aligned-double-patterning-part-deux\/\">Self-Aligned Double Patterning\u2014Part Deux<\/a><\/p><\/blockquote>\n<p><iframe loading=\"lazy\" class=\"wp-embedded-content\" sandbox=\"allow-scripts\" security=\"restricted\" style=\"position: absolute; visibility: hidden;\" title=\"&#8220;Self-Aligned Double Patterning\u2014Part Deux&#8221; &#8212; Semiconductor Engineering\" src=\"https:\/\/semiengineering.com\/self-aligned-double-patterning-part-deux\/embed\/#?secret=khC8V7jc3b#?secret=0Ht0Dab9sH\" data-secret=\"0Ht0Dab9sH\" width=\"500\" height=\"282\" frameborder=\"0\" marginwidth=\"0\" marginheight=\"0\" scrolling=\"no\"><\/iframe><br \/>\n\u3053\u308c\u306f\u3001\u3088\u308a\u4e00\u822c\u7684\u306b\u306f multiple patterning \u3068\u547c\u3070\u308c\u308b\u6280\u8853\u306e\u4e00\u90e8\u306e\u3088\u3046\u3067\u3059\u3002wikipedia\u306b\u65e5\u672c\u8a9e\u306e\u30da\u30fc\u30b8\u304c\u306a\u3044\u306e\u306f\u3001\u305d\u306e\u90e8\u5206\u306e\u6559\u80b2\u304c\u4e0d\u8db3\u3057\u3066\u3044\u308b\u304b\u3089\u304b\u3082\u3057\u308c\u307e\u305b\u3093\u3002\u660e\u65e5\u3001\u3057\u3063\u304b\u308a\u8b1b\u7fa9\u3057\u307e\u3059\u3002<br \/>\nhttps:\/\/en.wikipedia.org\/wiki\/Multiple_patterning<br \/>\n\u3053\u308c\u3092\u898b\u308b\u524d\u306f\u3001\u6ce2\u9577\u9650\u754c\u4ee5\u4e0b\u306e\u69cb\u9020\u3092\u4f5c\u308b\u306e\u306b\u30d5\u30a9\u30c8\u30ec\u30b8\u30b9\u30c8\u611f\u5ea6\u306e\u975e\u7dda\u5f62\u6027\u3092\u4f7f\u3063\u3066\u3044\u308b\u306e\u304b\u3068\u601d\u3063\u3066\u3044\u307e\u3057\u305f\u3002\u305d\u308c\u3082\u4f7f\u3063\u3066\u3044\u307e\u3059\u304c\u3001\u7a74\u306e\u7aef\u306b\u304a\u3051\u308b\u7269\u8cea\u306e\u5806\u7a4d\u901f\u5ea6\u306e\u975e\u7dda\u5f62\u6027\uff08\u7a74\u306e\u7aef\u304b\u3089\u306e\u8ddd\u96e2\u306e\u95a2\u6570\u3068\u3057\u3066\uff09\u3092\u4f7f\u3063\u3066\u3044\u308b\u3053\u3068\u306b\u306a\u308a\u307e\u3059\u306d\u3002\u78ba\u304b\u306b\u305d\u306e\u307b\u3046\u304c\u697d\u306b\u5c0f\u3055\u3044\u3082\u306e\u304c\u4f5c\u308c\u307e\u3059\u3002<br \/>\n\u8ad6\u6587\u3092\u8abf\u3079\u308b\u3068\u3001\u6771\u4eac\u30a8\u30ec\u30af\u30c8\u30ed\u30f3\u304c\u3044\u308d\u3044\u308d\u767a\u8868\u3057\u3066\u3044\u308b\u3088\u3046\u3067\u3059\uff08\u6709\u6599\u306a\u306e\u3067\u8a73\u7d30\u306f\u4e0d\u660e\uff09\u3002<br \/>\n\u7269\u8cea\u306e\u9078\u629e\u3084\u9732\u5149\u3001\u30a8\u30c3\u30c1\u30f3\u30b0\u30d7\u30ed\u30bb\u30b9\u306e\u30d1\u30e9\u30e1\u30fc\u30bf\u63a2\u7d22\u306b\u6c17\u306e\u9060\u304f\u306a\u308b\u3088\u3046\u306a\u624b\u9593\u304c\u304b\u304b\u308a\u305d\u3046\u3067\u3059\u304c\u3001\u5fae\u7d30\u5316\u3092\u9811\u5f35\u308b\u4fa1\u5024\u306f\u3042\u308b\u306e\u3067\u3001\u3084\u3063\u3066\u3044\u308b\u306e\u3067\u3057\u3087\u3046\u3002<br \/>\n\u88c5\u7f6e\u30e1\u30fc\u30ab\u30fc\u3068\u3057\u3066\u306f\u3001\u30a6\u30c1\u306e\u88c5\u7f6e\u306a\u3089\u3053\u3053\u307e\u3067\u5c0f\u3055\u3044\u306e\u304c\u3067\u304d\u308b\u3001\u3068\u3044\u3046\u30c7\u30e2\u3092\u767a\u8868\u3059\u308b\u306e\u306f\u55b6\u696d\u6d3b\u52d5\u3067\u3059\u306d\u3002\u534a\u5c0e\u4f53\u30e1\u30fc\u30ab\u30fc\u306f\u96a0\u3057\u305f\u3044\u3067\u3057\u3087\u3046\u304c\u3001\u4e8c\u56de\u9732\u5149\u3068\u30a8\u30c3\u30c1\u30f3\u30b0\u3092\u7e70\u308a\u8fd4\u3059pitch doubling \u306f\u534a\u5c0e\u4f53\u30e1\u30fc\u30ab\u30fc\u306eMicron Technology\u306e\u767a\u660e\u3068\u3057\u3066\u767a\u8868\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u99c6\u3051\u5f15\u304d\u3092\u60f3\u50cf\u3059\u308b\u3068\u9762\u767d\u3044\u3067\u3059\u3002<br \/>\n\u203b\u3000\u534a\u5c0e\u4f53\u5fae\u7d30\u52a0\u5de5\u3067\u300c\u3007nm\u300d\u3068\u3044\u3046\u306e\u306f\u5b9f\u969b\u306e\u5bf8\u6cd5\u3067\u306f\u306a\u3044\u3001\u3068\u3044\u3046\u8a71\u306f\u660e\u65e5\u3002<\/p>\n<p>\u82f1\u8a9e\u306f https:\/\/en.wikipedia.org\/wiki\/Multiple_patterning\u3000\u304b\u3089\u3002<br \/>\n&ldquo;Multiple patterning is a class of technologies developed for photolithography to enhance the feature density.&rdquo;<br \/>\nfeature \u5bb9\u8c8c\u3001\u7279\u8272\u3001\u4e3b\u8981\u306a\u70b9\u3000level 2 \u65e5\u672c\u8a9e\u306b\u306a\u3044\u6982\u5ff5\u3067\u3001\u30cb\u30e5\u30a2\u30f3\u30b9\u3092\u304d\u3061\u3093\u3068\u628a\u63e1\u3057\u3066\u4f7f\u3048\u308b\u3088\u3046\u306b\u306a\u308b\u3079\u304d\u5358\u8a9e\u3067\u3059\u3002\u3000\u3000\u3053\u3053\u3067\u306f\u69cb\u9020\u3068\u3044\u3046\u610f\u5473\u3067\u3057\u3087\u3046\u3002\u52d5\u8a5e\u3068\u3057\u3066\u3082\u4f7f\u3044\u307e\u3059\u3002<br \/>\n\u3000weblio\u4f8b\u6587\u304b\u3089\u3002 This phone features a high-resolution camera.  \u300c\u642d\u8f09\u3057\u3066\u3044\u308b\u300d<br \/>\n\u3000The article features interviews with several experts.  \u300c\u7279\u96c6\u3057\u3066\u3044\u308b\u300d<br \/>\n\u3000\u3000article \u8a18\u4e8b  experts \u5c02\u9580\u5bb6<br \/>\n\u3000a salient feature \u7279\u5fb4\u3000\u3000salient \u30bb\u30a4\u308a\u30a8\u30f3\u30c8\u3000\u306f\u300c\u9855\u8457\u306a\u300d\u3000\u300c\u3068\u304c\u3063\u305f\u300d\u3000level 11\u3000a salient angle \u306f180\u5ea6\u672a\u6e80\u306e\u51f8\u89d2\u3002<br \/>\n\u3000a geographical feature called a bay   \u6e7e\u3068\u3044\u3046\u5730\u5f62<br \/>\n\u3000the autotracking feature \u81ea\u52d5\u8ffd\u5c3e\u6a5f\u80fd<br \/>\n&ldquo;Sometimes a feature pattern inherently contains more than one pitch, and furthermore, these pitches are incompatible to the extent that no illumination can simultaneously image both pitches satisfactorily.&rdquo;<br \/>\n\u3000inherently \u751f\u307e\u308c\u3064\u304d\u306e\u3000\u3053\u3053\u3067\u306f\u300c\u8a2d\u8a08\u81ea\u4f53\u304b\u3089\u304f\u308b\u300d\u304f\u3089\u3044\u3067\u3057\u3087\u3046\u304b<br \/>\n pitch \u9593\u9694<br \/>\n\u3000incompatible \u540c\u6642\u306b\u4f5c\u308c\u306a\u3044\u3001\u4e26\u3073\u7acb\u305f\u306a\u3044<br \/>\n to the extent that \uff5e\u3068\u306a\u308b\u304f\u3089\u3044\u306b<br \/>\n&ldquo;A more serious concern was the effect of feature-to-feature positioning errors (overlay). Consequently, the self-aligned sidewall imaging approach (described below) has succeeded this approach.&rdquo;<br \/>\n concern \u61f8\u5ff5<br \/>\n feature-to-feature positioning errors \u69cb\u9020\u3069\u3046\u3057\u306e\u4f4d\u7f6e\u5408\u308f\u305b\u306e\u8aa4\u5dee<br \/>\n\u3000consequently, \uff08\u526f\u8a5e\u3067\u3059\u304c\u63a5\u7d9a\u8a5e\u306e\u3088\u3046\u306b\u3064\u304b\u3044\u307e\u3059\uff09\u3000\u3057\u305f\u304c\u3063\u3066<br \/>\n\u3000succeed \u3068\u3063\u3066\u4ee3\u308f\u308b<\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u534a\u5c0e\u4f53\u5fae\u7d30\u52a0\u5de5\u306b\u3064\u3044\u3066\u53c2\u8003\u306b\u306a\u308b\u30b5\u30a4\u30c8\u304c\u3088\u3046\u3084\u304f\u898b\u3064\u304b\u308a\u307e\u3057\u305f\u3002\u660e\u65e5\u306e\u8b1b\u7fa9\u306b\u56f3\u3084\u52d5\u753b\u304c\u6b32\u3057\u304b\u3063\u305f\u306e\u3067\u52a9\u304b\u308a\u307e\u3057\u305f\u3002 Homepage \u5e83\u544a\u304c\u3042\u307e\u308a\u306a\u3044\u3053\u306e\u30b5\u30a4\u30c8\u304c\u3069\u3046\u3084\u3063\u3066\u53ce\u76ca\u3092\u4e0a\u3052\u3066\u3044\u308b\u306e\u304b\u4e0d\u601d\u8b70\u3067\u3059\u304c\u3001SPONSORS\u304c\u305f\u304f\u3055\u3093\u3042\u308a\u8cc7\u91d1\u3092\u3082\u3089\u3063\u3066\u3044\u308b\u306e\u304b\u3082\u3057\u308c\u307e\u305b\u3093\u3002\u6c42\u4eba\u306e\u30da\u30fc\u30b8\u306b\u305f\u304f\u3055\u3093\u8f09\u3063\u3066\u3044\u308b\u306e\u3067\u3001\u305d\u3053\u3067\u53ce\u76ca\u304c\u3042\u308b\u304b\u3082\u3057\u308c\u307e\u305b\u3093\u3002 \u5168\u3066\u306e\u30da\u30fc\u30b8\u304c\u82f1\u8a9e\u304b\u7c21\u4f53\u4e2d\u56fd\u8a9e\u306e\u9078\u629e\u306b\u306a\u3063\u3066\u3044\u308b\u306e\u304c\u307e\u305f\u4e0d\u601d\u8b70\u3067\u3059\u3002\u4e2d\u306e\u4eba\u306f\u7c73\u56fd\u30b7\u30ea\u30b3\u30f3\u30d0\u30ec\u30fc\u306e\u3088\u3046\u3067\u3059\u304c\u3001\u5927\u4e08\u592b\u3067\u3057\u3087\u3046\u304b\u3002 DUV(deep ultraviolet \u6df1\u7d2b\u5916\u7dda, \u901a\u5e38\u306fArF\u30a8\u30ad\u30b7\u30de\u30ec\u30fc\u30b6\u30fc\u306e\u6ce2\u9577193nm\u306e\u30b3\u30d2\u30fc\u30ec\u30f3\u30c8\u5149)\u30de\u30b9\u30af\u304b\u3089\u6ce2&hellip;<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"om_disable_all_campaigns":false,"_monsterinsights_skip_tracking":false,"_monsterinsights_sitenote_active":false,"_monsterinsights_sitenote_note":"","_monsterinsights_sitenote_category":0,"footnotes":""},"categories":[42,44],"tags":[5,7],"class_list":["post-1841","post","type-post","status-publish","format-standard","hentry","category-tech","category-materials","tag-tech","tag-materials"],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/www.sekaiken.com\/index.php?rest_route=\/wp\/v2\/posts\/1841","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.sekaiken.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.sekaiken.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.sekaiken.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.sekaiken.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=1841"}],"version-history":[{"count":0,"href":"https:\/\/www.sekaiken.com\/index.php?rest_route=\/wp\/v2\/posts\/1841\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.sekaiken.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=1841"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.sekaiken.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=1841"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.sekaiken.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=1841"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}