\u534a\u5c0e\u4f53\u3092\u4f5c\u308b\u305f\u3081\u306e\u5fae\u7d30\u52a0\u5de5\uff08\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\uff09\u306f\u3001\u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30d5\u30a1\u306e\u4e0a\u306b\u611f\u5149\u6a39\u8102\uff08\u30d5\u30a9\u30c8\u30ec\u30b8\u30b9\u30c8\uff09\u3092\u5857\u3063\u3066\u3001\u8a2d\u8a08\u3057\u305f\u56de\u8def\u56f3\u3092\u5199\u3057\u3053\u3080\u306e\u3067\u3059\u304c\u3001\u5c0f\u3055\u3044\u69cb\u9020\u306b\u306f\u3001\u6ce2\u9577\u306e\u77ed\u3044\u5149\u6e90\u304c\u5fc5\u8981\u3067\u3059\u3002ArF\u30ec\u30fc\u30b6\u30fc(\u6ce2\u9577193nm)\u306a\u3069\u306e\u7d2b\u5916\u5149\u6e90\u304c\u4f5c\u3089\u308c\u307e\u3057\u305f\u304c\u3001\u305d\u306e\u5148\u306f\u4e00\u8db3\u98db\u3073\u306b\u30ec\u30fc\u30b6\u30fc\u30d7\u30e9\u30ba\u30de\u5149\u6e90\u306b\u306a\u308a\u307e\u3057\u305f\u3002\u3053\u308c\u306f\u3001\u7269\u8cea\u306b\u5f37\u3044\u30ec\u30fc\u30b6\u30fc\u3092\u5f53\u3066\u3066\u4fa1\u96fb\u5b50\u3092\u63fa\u3055\u3076\u308b\u3053\u3068\u3067\u9ad8\u3044\u52b1\u8d77\u72b6\u614b\u3092\u4f5c\u308b\u3082\u306e\u3067\u3059\u3002\u305d\u306e\u969b\u3001\u5316\u5b66\u7d50\u5408\u304c\u5207\u308c\u3001\u96fb\u5b50\u3082\u539f\u5b50\u304b\u3089\u5207\u308a\u96e2\u3055\u308c\u308b\u306e\u3067\u30d7\u30e9\u30b9\u306e\u30a4\u30aa\u30f3\u3068\u96fb\u5b50\u306b\u5206\u304b\u308c\u305f\u30d7\u30e9\u30ba\u30de\u304c\u767a\u751f\u3057\u307e\u3059\u3002\u3055\u3089\u306b\u305d\u308c\u3089\u304c\u5149\u3092\u5438\u53ce\u3059\u308b\u306e\u3067\u3001\u975e\u5e38\u306b\u9ad8\u6e29\u306b\u306a\u308a\u3001\u9ad8\u901f\u96fb\u5b50\u306e\u885d\u7a81\u7b49\u3067\u5185\u6bbb\u96fb\u5b50\u3082\u52b1\u8d77\u3055\u308c\u307e\u3059\u3002\u3053\u308c\u304c\u3082\u3068\u306b\u623b\u308b\u6642\u306b\u8edfX\u7dda\u3092\u767a\u751f\u3057\u307e\u3059\u3002\u3053\u306e\u30ec\u30fc\u30b6\u30fc\u30d7\u30e9\u30ba\u30de\u5149\u6e90\u306e\u539f\u7406\u306f1980\u5e74\u4ee3\u306b\u958b\u767a\u3055\u308c\u307e\u3057\u305f\u3002\u6ce2\u9577\u306b\u5c11\u3057\u5e45\u306e\u3042\u308b\u5149\u6e90\u3067\u3059\u3002
\n\u3053\u308c\u3092\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u306b\u4f7f\u304a\u3046\u3068\u3059\u308b\u30d7\u30ed\u30b8\u30a7\u30af\u30c8\u304c\u5404\u56fd\u3067\u884c\u308f\u308c\u307e\u3057\u305f\u3002\u65e5\u672c\u306f\u56fd\u5bb6\u30d7\u30ed\u30b8\u30a7\u30af\u30c8\u3067\u95a2\u9023\u4f01\u696d\u3092\u96c6\u3081\u3001\u6c17\u4f53\u306e\u30ad\u30bb\u30ce\u30f3(Xe)\u3092\u4f7f\u304a\u3046\u3068\u9811\u5f35\u308a\u307e\u3057\u305f\u304c\u3001\u7c73\u56fdCymer\u793e\u304c\u932b\uff08\u30b9\u30ba\u3001Sn\uff09\u306e\u6db2\u6ef4\u3092\u4f7f\u3063\u305f\u30d7\u30e9\u30ba\u30de\u5149\u6e90\u306e\u5b9f\u7528\u5316\u3067\u4e00\u756a\u4e57\u308a\u3092\u679c\u305f\u3057\u307e\u3057\u305f(2009\u5e74)\u3002\u30aa\u30e9\u30f3\u30c0\u306eASML\u793e\u304c2013\u5e74\u306bCymer\u793e\u3092\u8cb7\u53ce\u3057\u3001\u72ec\u5360\u7684\u306b\u81ea\u793e\u306e\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u88c5\u7f6e\u3067\u4f7f\u3063\u3066\u3044\u307e\u3059\u300210\u5e74\u524d\u306e\u3053\u3053\u304c\u534a\u5c0e\u4f53\u5fae\u7d30\u52a0\u5de5\u7523\u696d\u306e\u5206\u5c90\u70b9\u3067\u3059\u306d\u3002\u53e4\u3044\u8a71\u3067\u306f\u3042\u308a\u307e\u305b\u3093\u3002
\nhttps:\/\/www.cymer.com\/history\/
\n\u6ce2\u9577\u306f13nm\u3067\u3001\u4e00\u6c17\u306b\u77ed\u304f\u306a\u308a\u307e\u3057\u305f\u3002\u8edfX\u7dda\u306b\u5bfe\u3059\u308b\u30ec\u30f3\u30ba\u3092\u4f5c\u308c\u308b\u7269\u8cea\u306f\u7121\u3044\u305f\u3081\u3001\u66f2\u9762\u306e\u93e1\u3092\u4f7f\u3063\u3066\u5e73\u884c\u5149\u3092\u4f5c\u308b\u3053\u3068\u306b\u306a\u308a\u307e\u3059\u3002
\n\u93e1\u306e\u6750\u8cea\u3082\u554f\u984c\u3067\u3001\u305d\u306e\u6ce2\u9577\u3067\u53cd\u5c04\u7387\u304c\u9ad8\u304f\u306a\u3044\u3068\u3044\u3051\u307e\u305b\u3093\u3002\u30e2\u30ea\u30d6\u30c7\u30f3\uff08Mo\uff09\u3092\u30d9\u30fc\u30b9\u3068\u3057\u305f\u591a\u5c64\u819c\u304c\u4f7f\u308f\u308c\u3066\u3044\u308b\u3068\u805e\u3044\u3066\u3044\u307e\u3059\u3002\u30b7\u30f3\u30af\u30ed\u30c8\u30ed\u30f3\u653e\u5c04\u5149\u3084\u30ec\u30fc\u30b6\u30fc\u30d7\u30e9\u30ba\u30de\u5149\u6e90\u3092\u4f7f\u3063\u3066\u8272\u3005\u306a\u7269\u8cea\u306e\u8edfX\u7dda\u306b\u5bfe\u3059\u308b\u5149\u5b66\u5b9a\u6570\u304c\u6e2c\u3089\u308c\u305f\u306e\u3067\u3001\u305d\u306e\u30c7\u30fc\u30bf\u3092\u4f7f\u3063\u3066\u8003\u3048\u3001\u6700\u7d42\u7684\u306b\u306f\u81ea\u5206\u305f\u3061\u3067\u6e2c\u5b9a\u3057\u305f\u306e\u3067\u306f\u306a\u3044\u304b\u3068\u60f3\u50cf\u3057\u3066\u3044\u307e\u3059\u3002
\n\u5f8c\u77e5\u6075\u306b\u306a\u308a\u307e\u3059\u304c\u3001\u5fae\u5c0f\u306a\u91d1\u5c5e\u306e\u6db2\u6ef4\u3092\u4f7f\u3046\u3068\u70b9\u5149\u6e90\u306b\u306a\u308b\u306e\u3067\u5e73\u884c\u5149\u3092\u4f5c\u308a\u3084\u3059\u3044\u8cea\u306e\u826f\u3044\u5149\u6e90\uff08\u696d\u754c\u7528\u8a9e\u3067\u306f\u300c\u8f1d\u5ea6\u304c\u9ad8\u3044\u300d\u3068\u8a00\u3046\uff09\u306b\u306a\u308a\u307e\u3059\u3002\u307e\u305f\u3001\u6c17\u4f53\u306eXe\u3088\u308a\u3082\u7269\u8cea\u306e\u5bc6\u5ea6\u304c\u9ad8\u3044\u306e\u3067\u52b1\u8d77\u306e\u52b9\u7387\u3082\u3088\u304f\u3001\u5f37\u3044\u5149\u304c\u53d6\u308a\u51fa\u305b\u308b\u3068\u601d\u3044\u307e\u3059\u3002Sn\u306b\u306a\u3063\u305f\u306e\u306f\u3001\u5316\u5b66\u7684\u5b89\u5b9a\u6027\u3001\u4fa1\u683c\u3001\u878d\u70b9\uff08\u6db2\u6ef4\u306e\u4f5c\u308a\u3084\u3059\u3055\uff09\u3001\u767a\u5149\u6ce2\u9577\u306a\u3069\u304c\u6c7a\u3081\u624b\u306b\u306a\u3063\u305f\u306e\u3067\u306f\u306a\u3044\u3067\u3057\u3087\u3046\u304b\u3002
\nSn\u306e\u30ab\u30b9\u304c\u98db\u3073\u6563\u308a\u307e\u3059\u304c\u3001\u5de7\u5999\u306a\u4ed5\u7d44\u307f\u3067\u5149\u3060\u3051\u3092\u53d6\u308a\u51fa\u3057\u3066\u3044\u307e\u3059\u3002
\n\u5149\u6e90\u3092\u542b\u30802nm\u7d1a\u306e\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u306e\u88c5\u7f6e\u306f\u4e00\u53f0500\u5104\u5186\u3068\u805e\u3044\u3066\u3044\u307e\u3059\u3002\u691c\u7d22\u3059\u308b\u3068\u30dc\u30fc\u30a4\u30f3\u30b0787-8\u304c1\u57fa$239M=360\u5104\u5186\uff08151\u5186\u63db\u7b97\uff09\u306a\u306e\u3067\u3001\u540c\u3058\u304f\u3089\u3044\u3067\u3059\u306d\u3002\u73fe\u5728\u306f\u9577\u3044\u4e88\u7d04\u306e\u5217\u304c\u3067\u304d\u3066\u3044\u308b\u305d\u3046\u3067\u3001\u3044\u3044\u30d3\u30b8\u30cd\u30b9\u3067\u3059\u3002<\/p>\n
\u65e5\u672c\u52e2\u304c\u306a\u305c\u3046\u307e\u304f\u3044\u304b\u306a\u304b\u3063\u305f\u304b\u3001\u306b\u3064\u3044\u3066\u306f\u3001\u904e\u53bb\u306e\u7c73\u56fd\u3068\u306e\u534a\u5c0e\u4f53\u6469\u64e6\u306e\u5f71\u97ff\u3067\u7c73\u56fd\u56fd\u7acb\u7814\u7a76\u6240\u3068\u306e\u5354\u696d\u3092\u65ad\u3089\u308c\u305f\u3053\u3068\u3092\u6307\u6458\u3059\u308b\u8a18\u4e8b\u304c\u3042\u308a\u307e\u3059\u3002\u3069\u3046\u3067\u3057\u3087\u3046\u304b\u3002
\nhttps:\/\/diamond.jp\/articles\/-\/318086<\/p>\n
\u5149\u6e90\u3092\u958b\u767a\u3057\u305fCymer\u793e\u306e\u4e2d\u306e\u4eba\u304c\u66f8\u3044\u305f\u8ad6\u6587\u3092\u898b\u3064\u3051\u307e\u3057\u305f\u3002Sn\u306e\u6db2\u6ef4\u306b\u307e\u305a\u5f31\u3044\u30ec\u30fc\u30b6\u30fc\u3092\u5f53\u3066\u3066\u68d2\u72b6\u306b\u5909\u5f62\u3055\u305b\u3001\u305d\u308c\u304b\u3089\u672c\u756a\u306e\u30ec\u30fc\u30b6\u30fc\u30d1\u30eb\u30b9\u3092\u5f53\u3066\u308b\u3053\u3068\u3067\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u306b\u90fd\u5408\u304c\u3044\u3044\u5149\u3092\u4f5c\u3063\u3066\u3044\u308b\u3088\u3046\u3067\u3059\u3002\u3053\u306e\u8fba\u3082\u7279\u8a31\u3067\u5b88\u3089\u308c\u3066\u3044\u308b\u306e\u3067\u3057\u3087\u3046\u3002\u30ec\u30fc\u30b6\u30fc\u304cCO2\u30ec\u30fc\u30b6\u30fc\u3060\u3063\u305f\u306e\u3082\u9a5a\u304d\u3067\u3059\u3002
\nhttps:\/\/www.degruyter.com\/document\/doi\/10.1515\/aot-2017-0029
\n\u6b21\u306f\u6ce2\u9577\u304c1\u6841nm\u306e\u5149\u6e90\u304c\u51fa\u3066\u304f\u308b\u304b\u3082\u3057\u308c\u307e\u305b\u3093\u3002\u3053\u306e\u8fba\u306f\u30b7\u30f3\u30af\u30ed\u30c8\u30ed\u30f3\u653e\u5c04\u5149\u306e\u5149\u5b66\u90e8\u54c1\u304c\u4f7f\u3048\u308b\u306e\u3067\u3001\u4e0a\u624b\u3044\u5149\u6e90\u304c\u898b\u3064\u304b\u308c\u3070\u5f8c\u767a\u306b\u3082\u30c1\u30e3\u30f3\u30b9\u304c\u3042\u308b\u304b\u3082\u3057\u308c\u307e\u305b\u3093\u3002
\n\u6ce2\u957713nm\u306e\u5149\u30672nm\u3092\u4f5c\u308d\u3046\u3068\u3059\u308b\u3068\u5e72\u6e09\u9732\u5149\u3001\u591a\u91cd\u9732\u5149\u304c\u51fa\u3066\u304f\u308b\u306e\u3067\u3001\u30ec\u30b8\u30b9\u30c8\u611f\u5ea6\u306e\u975e\u7dda\u5f62\u6027\u304c\u5fc5\u8981\u3067\u3059\u3002\u8edf\uff38\u7dda\u306b\u5bfe\u3059\u308b\u30ec\u30b8\u30b9\u30c8\u958b\u767a\u3082\u9762\u767d\u305d\u3046\u3067\u3059\u304c\u3001\u516c\u958b\u60c5\u5831\u306f\u3042\u307e\u308a\u3042\u308a\u307e\u305b\u3093\u3002\u79d8\u5bc6\u306b\u3057\u306a\u3044\u3068\u3044\u3051\u306a\u3044\u306e\u3067\u3001\u5927\u5b66\u3067\u306f\u3067\u304d\u306a\u3044\u7814\u7a76\u304b\u3082\u3057\u308c\u307e\u305b\u3093\u3002<\/p>\n
\u82f1\u8a9e\u306f\u3000https:\/\/www.lithoguru.com\/scientist\/glossary\/\u3000\u7b49\u304b\u3089\u3002\u3053\u306e\u30b5\u30a4\u30c8\u4e3b\u306f\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u306e\u6559\u79d1\u66f8\u3092\u66f8\u3044\u3066\u3044\u308b\u4eba(litho+guru)\u306e\u3088\u3046\u3067\u3059\u30022007\u5e74\u306a\u306e\u3067\u3001\u30d7\u30e9\u30ba\u30de\u5149\u6e90\u306f\u8f09\u3063\u3066\u3044\u306a\u3044\u3067\u3057\u3087\u3046\u306d\u3002
\n\u6700\u65b0\u306e\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u306b\u3064\u3044\u3066\u306f\u5171\u8457\u3057\u3066\u304f\u308c\u308b\u7d4c\u9a13\u8005\u3092\u52df\u96c6\u4e2d\u3001\u3068\u306e\u3053\u3068\u3067\u3001\u3053\u306e\u696d\u754c\u3067\u306f\u516c\u958b\u3055\u308c\u3066\u3044\u306a\u3044\u60c5\u5831\u304c\u305f\u304f\u3055\u3093\u3042\u308a\u305d\u3046\u3067\u3059\u3002
\n\u826f\u3044\u8ad6\u6587\u306e\u66f8\u304d\u65b9\u3001\u3068\u3044\u3046\u306e\u3082\u516c\u958b\u3055\u308c\u3066\u3044\u307e\u3059\u3002https:\/\/www.lithoguru.com\/scientist\/litho_papers\/How%20to%20write%20a%20good%20scientific%20paper%20-%20Chris%20Mack.pdf
\n\u6b21\u306e\u30a8\u30c3\u30bb\u30a4\u3082\u9762\u767d\u304b\u3063\u305f\u3067\u3059\u3002\u98db\u884c\u6a5f\u306e\u767a\u9054\u3068\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u3092\u5bfe\u6bd4\u3055\u305b\u3001EUV\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u306f\u9ad8\u4fa1\u3059\u304e\u3066\u30b3\u30f3\u30b3\u30eb\u30c9\u306e\u3088\u3046\u306b\u4f7f\u308f\u308c\u306a\u304f\u306a\u308b\u3060\u308d\u3046\u3001\u3068\u4e88\u60f3\u3057\u3066\u3044\u307e\u3059\uff082012\u5e74\uff09\u3002\u3053\u308c\u306f\u3001\u306f\u305a\u308c\u3066\u3044\u307e\u3059\u306d\u3002
\n\u3000https:\/\/www.lithoguru.com\/scientist\/essays\/EUV_SST.html<\/p>\n
guru \u30b0\u30eb\u3001\u30d2\u30f3\u30ba\u30fc\u6559\u306a\u3069\u306e\u5c0e\u5e2b\u3001\u6a29\u5a01\u8005\u3001\u5c02\u9580\u5bb6
\naberrations, lens \u30ec\u30f3\u30ba\u306e\u53ce\u5dee
\npupil, lens \u30ec\u30f3\u30ba\u306e\u5165\u5c04\u77b3\u3000pupil \u30d4\u30e5\u30fc\u30d4\u308b\u306f\u300c\u77b3\u300d
\niris \u30a2\u30a4\u30ea\u30b9\u3000\u773c\u306e\u8679\u5f69\u3001\u30ab\u30e1\u30e9\u306e\u7d5e\u308a\u3001\u690d\u7269\u306e\u30a2\u30e4\u30e1
\nbokeh \u30dc\u30b1\uff08\u5199\u771f\u7528\u8a9e\u3002\u65e5\u672c\u8a9e\u304c\u82f1\u8a9e\u306b\u306a\u3063\u305f\uff09
\n“Saggital Lines: Line patterns oriented along the radial direction from the optical axis (i.e., the center) of an imaging system.”
\nsaggital \u306f\u3000\u77e2\u8ef8\u72b6\u3000\u3068\u8a33\u3057\u307e\u3059\u3002\u77e2\u7fbd\u6839\u306e\u3088\u3046\u306b\u653e\u5c04\u72b6\u306b\u5e83\u304c\u3063\u305f\u5f62
\nsurfactant \u754c\u9762\u6d3b\u6027\u5264
\n“Stepper: A type of projection printing tool that exposes a small portion of a wafer at one time, and then steps the wafer to a new location to repeat the exposure. Also called a step-and-repeat camera.
\nExample: Since their introduction in the late 1970s, steppers have dominated the lithographic market. “
\n“immersion lithography : A mode of optical lithography where an immersion fluid, with a refractive index greater than 1, fills the gap between the projection lens and the wafer. ” \u6db2\u6d78\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3<\/p>\n","protected":false},"excerpt":{"rendered":"
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