MEMS\u3092\u4f5c\u308b\u3068\u304d\u306b\u306f\u3001\u30b7\u30ea\u30b3\u30f3\u306e\u72d9\u3063\u305f\u5834\u6240\u3092\u6df1\u5f6b\u308a\u3057\u305f\u308a\u3001\u7a7a\u6d1e\u3092\u4f5c\u308a\u305f\u3044\u3068\u304d\u304c\u3042\u308a\u307e\u3059\u3002\u30d5\u30c3\u7d20\u7cfb\u306e\u30d7\u30e9\u30ba\u30de\u3082\u4f7f\u3044\u307e\u3059\u304c\u3001XeF2\u306f\u72ec\u7279\u306e\u9577\u6240\u304c\u3042\u308a\u3088\u304f\u4f7f\u308f\u308c\u307e\u3059\u3002
\nhttps:\/\/ja.wikipedia.org\/wiki\/%E4%BA%8C%E3%83%95%E3%83%83%E5%8C%96%E3%82%AD%E3%82%BB%E3%83%8E%E3%83%B3
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\nhttps:\/\/www.jstage.jst.go.jp\/article\/sfj\/68\/7\/68_379\/_pdf
\n\u53cd\u5fdc\u5f0f\u306f\u30002XeF2 + Si \u2192 2Xe + SiF4\u2191\u3000\u3067\u3059\u3002\u53cd\u5fdc\u306f\u9ad8\u901f\u3067\u3001SiO2\u3084\u9ad8\u5206\u5b50\u30d5\u30a9\u30c8\u30ec\u30b8\u30b9\u30c8\u3001Al,Cr, TiN\u306a\u3069\u306f\u30a8\u30c3\u30c1\u30f3\u30b0\u3055\u308c\u306a\u3044\uff08\u9078\u629e\u6bd41000\u4ee5\u4e0a\uff09\u306e\u3067\u3001\u30a2\u30b9\u30da\u30af\u30c8\u6bd4\u306e\u9ad8\u3044\u52a0\u5de5\u304c\u53ef\u80fd\u3067\u3059\u3002XeF2\u306f\u5ba4\u6e29\u84b8\u6c17\u57274torr\u304f\u3089\u3044\u306e\u56fa\u4f53\u3067\u3001\u30cb\u30c3\u30b1\u30eb\u5bb9\u5668\u7b49\u306e\u5bc6\u9589\u7a7a\u9593\u306b\u5165\u308c\u3066\u304a\u304f\u3068\u56fa\u4f53\u3068\u3057\u3066\u4fdd\u5b58\u3067\u304d\u307e\u3059\u304c\u3001\u30ed\u30fc\u30bf\u30ea\u30fc\u30dd\u30f3\u30d7\u30ec\u30d9\u30eb\u3067\u6392\u6c17\u3059\u308b\u3068\u6c17\u5316\u3057\u307e\u3059\u3002\u6614\u8cb7\u304a\u3046\u3068\u3057\u305f\u3068\u304d\u306f\u3001\u3057\u3070\u3089\u304f\u4f7f\u3048\u308b\u91cf\u304c25\u4e07\u5186\u304f\u3089\u3044\u3067\u3057\u305f\uff08\u30b0\u30e9\u30e0\u6570\u306f\u5fd8\u308c\u307e\u3057\u305f(10g?)\uff09\u3002\u30b7\u30ea\u30b3\u30f3\u8868\u9762\u306b\u5438\u7740\u3059\u308b\u3068\u5206\u89e3\u3057\u3066F\u304c\u51fa\u3066\u30a8\u30c3\u30c1\u30f3\u30b0\u3057\u307e\u3059\u3002<\/p>\n
\u72a0\u7272\u5c64\u3000sacrificial layer \u30b5\u30af\u30ea\u300c\u30d5\u30a3\u300d\u30b7\u30e3\u30eb
\nsacrifice \u300c\u30b5\u300d\u30af\u30ea\u30d5\u30a1\u30a4\u30b9\u3000\u72a0\u7272\uff08\u306b\u3059\u308b\uff09\u3000\u52d5\u8a5e\u306f\u3000\u2252 give up
\nAfter all, work, particularly mule-hard labor, is, like motherhood, a sacrificial virtue.
\n\u3000\u7d50\u5c40\u306e\u3068\u3053\u308d\u3001\u4ed5\u4e8b\u3001\u4f8b\u3048\u3070\u6bcd\u89aa\u696d\u306e\u3088\u3046\u306a\u7279\u306b\u9aa8\u306e\u6298\u308c\u308b\u52b4\u50cd\u306f\u3001\u81ea\u5df1\u72a0\u7272\u3092\u4f34\u3046\u7f8e\u5fb3\u3067\u3042\u308b\u3002
\nmule \u30df\u30e5\u30fc\u308b\u3000\u30ed\u30d0
\nvirtue \u300c\u30f4\u30a1\u300d\u30fc\u30c1\u30e5\u30fc \u7f8e\u5fb3
\nBrave personal sacrifices are juxtaposed with quirky moments.
\n\u52c7\u6562\u306a\u81ea\u5df1\u72a0\u7272\u306f\u975e\u65e5\u5e38\u7684\u77ac\u9593\u306b\u96a3\u63a5\u3057\u3066\u8d77\u3053\u308b\u3000\uff08\uff1f\u3000LDOCE\u306e\u4f8b\u6587\u3067\u3059\u304c\u3001\u96e3\u3057\u3044\u6587\u3067\u3059\u306d\uff09
\njuxtapose \u300c\u30b8\u30e3\u300d\u30af\u30b9\u30bf\u30dd\u30a6\u30ba\u3000\uff08\u6bd4\u8f03\u3084\u65b0\u3057\u3044\u3082\u306e\u3092\u3064\u304f\u308b\u305f\u3081\u306b\uff092\u3064\u306e\u3082\u306e\u3092\u96a3\u63a5\u3055\u305b\u308b
\nquirky \u30af\u30ee\u30fc\u30ad\u30fc\u3000unusual, especially in an interesting way.
\n I like his quirky sense of humor. \u5f7c\u306e\u5909\u308f\u3063\u305f\u30e6\u30fc\u30e2\u30a2\u306e\u30bb\u30f3\u30b9\u304c\u597d\u304d\u3060\u3002
\n\u8cbc\u308a\u7740\u304d\u3000sticking
\nxenon\u3000\u30bc\u30fc\u30ce\u30f3\u3000\u30ad\u30bb\u30ce\u30f3
\nisotropic gaseous etchant \u30a2\u30a4\u30bd\u30c8\u300c\u30ed\u300d\u30d4\u30c3\u30af\u3000\u300c\u30ae\u30e3\u300d\u30bb\u30a2\u30b9\u3000\u300c\u30a8\u30c3\u300d\u30c1\u30e3\u30f3\u30c8 \u3000\u7b49\u65b9\u7684\u6c17\u4f53\u30a8\u30c3\u30c1\u30e3\u30f3\u30c8<\/p>\n","protected":false},"excerpt":{"rendered":"
MEMS\u3092\u4f5c\u308b\u3068\u304d\u306b\u306f\u3001\u30b7\u30ea\u30b3\u30f3\u306e\u72d9\u3063\u305f\u5834\u6240\u3092\u6df1\u5f6b\u308a\u3057\u305f\u308a\u3001\u7a7a\u6d1e\u3092\u4f5c\u308a\u305f\u3044\u3068\u304d\u304c\u3042\u308a\u307e\u3059\u3002\u30d5\u30c3\u7d20\u7cfb\u306e\u30d7\u30e9\u30ba\u30de\u3082\u4f7f\u3044\u307e\u3059\u304c\u3001XeF2\u306f\u72ec\u7279\u306e\u9577\u6240\u304c\u3042\u308a\u3088\u304f\u4f7f\u308f\u308c\u307e\u3059\u3002 https:\/\/ja.wikipedia.org\/wiki\/%E4%BA%8C%E3%83%95%E3%83%83%E5%8C%96%E3%82%AD%E3%82%BB%E3%83%8E%E3%83%B3 XeF2\u306f\u6709\u6a5f\u5316\u5b66\u306e\u30d5\u30c3\u7d20\u5316\u8a66\u85ac\u3068\u3057\u3066\u3082\u4f7f\u3044\u307e\u3059\u304c\u3001\u4e0b\u8a18\u306e\u6587\u732e\u306b\u3042\u308b\u3088\u3046\u306bXeF2\u306fSi\u72a0\u7272\u5c64\u30a8\u30c3\u30c1\u30f3\u30b0\u306b\u3088\u308a\u4e2d\u7a7a\u69cb\u9020\u3084\u6b6f\u8eca\u306a\u3069\u3092\u4f5c\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002\u30a6\u30a7\u30c3\u30c8\u30a8\u30c3\u30c1\u30f3\u30b0\u3067\u306f\u8868\u9762\u5f35\u529b\u306b\u3088\u308b\u8cbc\u308a\u7740\u304d\u304c\u554f\u984c\u306b\u306a\u308a\u307e\u3059\u304c\u3001XeF2\u306f\u30c9\u30e9…<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"om_disable_all_campaigns":false,"_monsterinsights_skip_tracking":false,"_monsterinsights_sitenote_active":false,"_monsterinsights_sitenote_note":"","_monsterinsights_sitenote_category":0,"footnotes":""},"categories":[42,44],"tags":[5,7],"class_list":["post-1338","post","type-post","status-publish","format-standard","hentry","category-tech","category-materials","tag-tech","tag-materials"],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/www.sekaiken.com\/index.php?rest_route=\/wp\/v2\/posts\/1338","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.sekaiken.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.sekaiken.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.sekaiken.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.sekaiken.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=1338"}],"version-history":[{"count":0,"href":"https:\/\/www.sekaiken.com\/index.php?rest_route=\/wp\/v2\/posts\/1338\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.sekaiken.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=1338"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.sekaiken.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=1338"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.sekaiken.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=1338"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}