{"id":1116,"date":"2020-12-24T00:00:00","date_gmt":"2020-12-24T00:00:00","guid":{"rendered":"urn:uuid:2d7f42ad-aef0-4edf-b4bd-ae396495d5d4"},"modified":"2020-12-24T00:00:00","modified_gmt":"2020-12-24T00:00:00","slug":"orantaasmltozui-jin-norisokurahuiji-shu-3","status":"publish","type":"post","link":"https:\/\/www.sekaiken.com\/?p=1116","title":{"rendered":"\u30aa\u30e9\u30f3\u30c0ASML\u3068\u6700\u8fd1\u306e\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u6280\u8853(3)"},"content":{"rendered":"<p>\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u306bEUV\u5149\u6e90\u3092\u4f7f\u3048\u3070\u3001\u9ad8\u4fa1\u306a\u30de\u30b9\u30af\u306e\u679a\u6570\u3092UV\u5149\u6e90\u306b\u6bd4\u3079\u306610\u5206\u306e\uff11\u4ee5\u4e0b\u306b\u6e1b\u3089\u305b\u307e\u3059\u3002\u30de\u30b9\u30af\u4ea4\u63db\u30fb\u4f4d\u7f6e\u5408\u308f\u305b\u306e\u624b\u9593\u3082\u305d\u306e\u5206\u6e1b\u308b\u306e\u3067\u751f\u7523\u6027\u3082\u4e0a\u304c\u308a\u307e\u3059\u3002<br \/>\nEUV\u5149\u6e90\u306f\u6ce2\u957713.5nm\u7a0b\u5ea6\u306e\u6975\u7aef\u7d2b\u5916\u7dda(extreme ultraviolet)\u3068\u3044\u3046\u3088\u308a\u8edfX\u7dda\u3067\u3001ArF\u30ec\u30fc\u30b6\u30fc(193nm)\u3088\u308a\u30821\u6841\u4ee5\u4e0a\u77ed\u3044\u3067\u3059\u3002<br \/>\nhttps:\/\/en.wikipedia.org\/wiki\/Extreme_ultraviolet_lithography<br \/>\n\u901a\u5e38\u306e\u7269\u8cea\u306f\u3001\u3044\u304f\u3089\u52b1\u8d77\u3057\u3066\u3082\u5316\u5b66\u7d50\u5408\u306e\u30a8\u30cd\u30eb\u30ae\u30fc\u3088\u308a\u3082\u305a\u3063\u3068\u9ad8\u3044\u30a8\u30cd\u30eb\u30ae\u30fc\u3092\u6301\u3064EUV\u306e\u5149\u3092\u51fa\u3059\u3053\u3068\u306f\u3067\u304d\u307e\u305b\u3093\uff08\u5316\u5b66\u7d50\u5408\u304c\u5207\u308c\u3066\u58ca\u308c\u3066\u3057\u307e\u3046\uff09\u3002\u539f\u5b50\u307e\u3067\u5206\u89e3\u3055\u308c\u305f\u7269\u8cea\u3067\u3042\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002\u6db2\u4f53\u306e\u30b9\u30ba\u3084\u6db2\u4f53\u30ad\u30bb\u30ce\u30f3\u306a\u3069\u306e\u30bf\u30fc\u30b2\u30c3\u30c8\u306b\u9ad8\u51fa\u529b\u30ec\u30fc\u30b6\u30fc\u3092\u96c6\u5149\u3055\u305b\u3001\u3067\u304d\u305f\u30d7\u30e9\u30ba\u30de\uff08\u539f\u5b50\u306e\u30a4\u30aa\u30f3\u3068\u96fb\u5b50\u306e\u96c6\u5408\u4f53\uff09\u306e\u9ad8\u52b1\u8d77\u72b6\u614b\u304b\u3089\u306e\u767a\u5149\u3092\u4f7f\u3044\u307e\u3059\u3002\u53cd\u5c04\u93e1\u3068\u3057\u3066\u7528\u3044\u3089\u308c\u308bMo-Si\u591a\u5c64\u819c\u306e\u53cd\u5c04\u7387\u304c13.5nm\u3067\u9ad8\u3044\u306e\u3067\u3001\u305d\u306e\u767a\u5149\u7dda\u3092\u6301\u3064\u30b9\u30ba\u304c\u4e3b\u6d41\u306b\u306a\u308a\u307e\u3057\u305f\u3002\u5927\u90e8\u5206\u306e\u7279\u8a31\u306fASML\u306b\u304a\u3055\u3048\u3089\u308c\u3066\u3044\u307e\u3059(\u65e5\u672c\u56fd\u5185380\u4ef6\uff09\u3002<br \/>\nhttps:\/\/www.osa-opn.org\/home\/articles\/volume_29\/march_2018\/features\/euv_light_sources_for_next-gen_lithography\/<br \/>\n\u52d5\u753b\u306f\u3053\u3061\u3089<br \/>\n<iframe loading=\"lazy\" title=\"How An EUV Light Source Works\" width=\"500\" height=\"281\" src=\"https:\/\/www.youtube.com\/embed\/5yTARacBxHI?feature=oembed\" frameborder=\"0\" allow=\"accelerometer; autoplay; clipboard-write; encrypted-media; gyroscope; picture-in-picture; web-share\" referrerpolicy=\"strict-origin-when-cross-origin\" allowfullscreen><\/iframe><br \/>\n<iframe loading=\"lazy\" title=\"Laser and tin in the light source - Inside the TWINSCAN NXE:3400 EUV lithography machine | ASML\" width=\"500\" height=\"281\" src=\"https:\/\/www.youtube.com\/embed\/IattxYrc9Go?feature=oembed\" frameborder=\"0\" allow=\"accelerometer; autoplay; clipboard-write; encrypted-media; gyroscope; picture-in-picture; web-share\" referrerpolicy=\"strict-origin-when-cross-origin\" allowfullscreen><\/iframe><br \/>\n\u4e0b\u306e\u52d5\u753b\u306f2009\u5e74\u4f5c\u3067\u3059\u3002\u88c5\u7f6e\u304c\u73fe\u5b9f\u306b\u4f7f\u308f\u308c\u308b\u3088\u3046\u306b\u306a\u3063\u305f\u306e\u306f\u53bb\u5e74\u304b\u3089\u3067\u3059\u306e\u3067\u3001\u5de5\u5834\u3092\u4f5c\u308a\u59cb\u3081\u3066\u304b\u3089\u9700\u8981\u304c\u7acb\u3061\u3042\u304c\u308b\u307e\u3067\u306b10\u5e74\u9593\u304b\u304b\u3063\u3066\u3044\u307e\u3059\u3002<br \/>\n<iframe loading=\"lazy\" title=\"ASML: Chip making goes vacuum with EUV\" width=\"500\" height=\"281\" src=\"https:\/\/www.youtube.com\/embed\/u4uTn4lq7Kw?feature=oembed\" frameborder=\"0\" allow=\"accelerometer; autoplay; clipboard-write; encrypted-media; gyroscope; picture-in-picture; web-share\" referrerpolicy=\"strict-origin-when-cross-origin\" allowfullscreen><\/iframe><br \/>\n\u6db2\u4f53\u30b9\u30ba\u3092\u4f7f\u3046\u3068\u304d\u3001\u5e38\u306b\u4e00\u5b9a\u306e\u5f62\u72b6\u3092\u6db2\u6ef4\u3068\u3057\u3066\u4f9b\u7d66\u3059\u308b\u306e\u304c\u6280\u3067\u3059\u306d\u3002\u65e5\u672c\u52e2\u306f\u3001\u56fd\u306e\u30b5\u30dd\u30fc\u30c8\u3067\u30a6\u30b7\u30aa\u96fb\u6a5f\u3084\u30cb\u30b3\u30f3\u304c\u6280\u8853\u7d44\u5408\u3092\u4f5c\u3063\u3066\u3044\u307e\u3057\u305f\u304c\u3001\u767a\u5149\u6ce2\u957711nm\u306eXe\uff08\u9ad8\u4fa1\uff01\uff09\u3092\u4f7f\u304a\u3046\u3068\u3057\u3066\u81f4\u547d\u7684\u306a\u9045\u308c\u3092\u3068\u3063\u3066\u3057\u307e\u3044\u307e\u3057\u305f\u3002Xe\u306f\u53cd\u5c04\u93e1\u3092\u6c5a\u3055\u306a\u3044\u306a\u3069\u306e\u30e1\u30ea\u30c3\u30c8\u306f\u3042\u308b\u306e\u3067\u3059\u304c\u3001Sn\u5149\u6e90\u306f\u767a\u5149\u52b9\u7387\u304c\u3088\u304f\u3001\u305d\u306e\u4e2d\u6027\u7c92\u5b50\u306f\u78c1\u5834\u3001\u96fb\u5834\u3001\u9ad8\u901f\u56de\u8ee2\u3059\u308b\u5438\u7740\u677f\uff08\u5149\u306f\u901a\u904e\u3067\u304d\u308b\u304c\u3001Sn\u7c92\u5b50\u306f\u5438\u7740\u3055\u308c\u308b\uff09\u3067\u9664\u53bb\u3067\u304d\u308b\uff08\u7279\u88682009-531854\uff09\u305f\u3081\u5927\u304d\u306a\u30e1\u30ea\u30c3\u30c8\u3067\u306f\u306a\u304f\u306a\u3063\u3066\u3044\u307e\u3059\u3002\u696d\u754c\u6a19\u6e96\u3092\u6c7a\u3081\u308b\u306f\u305a\u306e\u56fd\u5185\u534a\u5c0e\u4f53\u4f01\u696d\u304c\u6fc0\u6e1b\u3057\u305f\u306e\u3082\u5927\u304d\u3044\u3067\u3059\u3002\u6b8b\u5ff5\u306a\u304c\u3089\u3001EUV\u5149\u6e90\u3067\u65e5\u672c\u304c\u5dfb\u304d\u8fd4\u305d\u3046\u3068\u3044\u3046\u52d5\u304d\u306f\u3044\u307e\u306e\u3068\u3053\u308d\u898b\u3048\u307e\u305b\u3093\u3002<\/p>\n<p>\u9593\u9694 spacing<br \/>\n\u5e72\u6e09\u3000interferrence<br \/>\n\u9732\u5149\u3000exposure<br \/>\n\u73fe\u50cf\u3000development<br \/>\n\u5b9a\u7740\u3000fixation<br \/>\n\u3076\u308c\u3000blur \u30d6\u3089\u30fc<br \/>\n\u307c\u3051\u3000Bokeh\u3000\u30dc\u30a6\u30ab\u307e\u305f\u306f\u30dc\u30a6\u30b1\u30a4\u3068\u767a\u97f3\u3055\u308c\u308b\u3002\u65e5\u672c\u8a9e\u304b\u3089\u3002<br \/>\nhttps:\/\/en.wikipedia.org\/wiki\/Bokeh<br \/>\n\u30b7\u30e3\u30c3\u30bf\u30fc\u30c1\u30e3\u30f3\u30b9\u3000photo op (=opportunity)<br \/>\n\u5199\u771f\u3092\u64ae\u308b\u3000shoot<br \/>\n\u5e83\u89d2\u30ec\u30f3\u30ba\u3067\u64ae\u308b shoot with a wide angle lens<br \/>\n\u9006\u5149\u3067\u9854\u304c\u6697\u304f\u306a\u3063\u3066\u3044\u307e\u3059\u3002\u3000The face is dark because of backlight.<br \/>\n\u307e\u3070\u305f\u304d\u3000blinking<br \/>\n\u4e00\u90e8\u4e0b\u8a18\u304b\u3089\u3002<br \/>\nhttps:\/\/priusshota.com\/englishforphotographers<\/p>\n<p>\u4eca\u56de\u306f\u5c02\u9580\u7528\u8a9e\u306f\u306a\u3057\u3067\u3059\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u306bEUV\u5149\u6e90\u3092\u4f7f\u3048\u3070\u3001\u9ad8\u4fa1\u306a\u30de\u30b9\u30af\u306e\u679a\u6570\u3092UV\u5149\u6e90\u306b\u6bd4\u3079\u306610\u5206\u306e\uff11\u4ee5\u4e0b\u306b\u6e1b\u3089\u305b\u307e\u3059\u3002\u30de\u30b9\u30af\u4ea4\u63db\u30fb\u4f4d\u7f6e\u5408\u308f\u305b\u306e\u624b\u9593\u3082\u305d\u306e\u5206\u6e1b\u308b\u306e\u3067\u751f\u7523\u6027\u3082\u4e0a\u304c\u308a\u307e\u3059\u3002 EUV\u5149\u6e90\u306f\u6ce2\u957713.5nm\u7a0b\u5ea6\u306e\u6975\u7aef\u7d2b\u5916\u7dda(extreme ultraviolet)\u3068\u3044\u3046\u3088\u308a\u8edfX\u7dda\u3067\u3001ArF\u30ec\u30fc\u30b6\u30fc(193nm)\u3088\u308a\u30821\u6841\u4ee5\u4e0a\u77ed\u3044\u3067\u3059\u3002 https:\/\/en.wikipedia.org\/wiki\/Extreme_ultraviolet_lithography \u901a\u5e38\u306e\u7269\u8cea\u306f\u3001\u3044\u304f\u3089\u52b1\u8d77\u3057\u3066\u3082\u5316\u5b66\u7d50\u5408\u306e\u30a8\u30cd\u30eb\u30ae\u30fc\u3088\u308a\u3082\u305a\u3063\u3068\u9ad8\u3044\u30a8\u30cd\u30eb\u30ae\u30fc\u3092\u6301\u3064EUV\u306e\u5149\u3092\u51fa\u3059\u3053\u3068\u306f\u3067\u304d\u307e\u305b\u3093\uff08\u5316\u5b66\u7d50\u5408\u304c\u5207\u308c\u3066\u58ca\u308c\u3066\u3057\u307e\u3046\uff09\u3002\u539f\u5b50&hellip;<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"om_disable_all_campaigns":false,"_monsterinsights_skip_tracking":false,"_monsterinsights_sitenote_active":false,"_monsterinsights_sitenote_note":"","_monsterinsights_sitenote_category":0,"footnotes":""},"categories":[43,42],"tags":[6,5],"class_list":["post-1116","post","type-post","status-publish","format-standard","hentry","category-companies","category-tech","tag-companies","tag-tech"],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/www.sekaiken.com\/index.php?rest_route=\/wp\/v2\/posts\/1116","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.sekaiken.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.sekaiken.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.sekaiken.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.sekaiken.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=1116"}],"version-history":[{"count":0,"href":"https:\/\/www.sekaiken.com\/index.php?rest_route=\/wp\/v2\/posts\/1116\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.sekaiken.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=1116"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.sekaiken.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=1116"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.sekaiken.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=1116"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}