ArF\u6db2\u6d78\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u306f\u3001ArF\u30ec\u30fc\u30b6\u30fc\u3092\u4f7f\u3063\u305f193nm\u306e\u7d2b\u5916\u7dda\u3092\u4f7f\u3063\u3066\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fc\u3057\u307e\u3059\u3002ArF\u30ec\u30fc\u30b6\u30fc\u306f\u30a8\u30ad\u30b7\u30de\u30fc\u30ec\u30fc\u30b6\u30fc\u306e\u4e00\u3064\u3067\u3059\u3002\u30a8\u30ad\u30b7\u30de\u30fcexcimer\u3068\u3044\u3046\u306e\u306f\u3001\u52b1\u8d77\u72b6\u614b\u3067\u5b89\u5b9a\u306a\u539f\u5b50\u3084\u5206\u5b50\u306e\u4f1a\u5408\u4f53\u3067\u3059\u3002ArF\u306e\u5834\u5408\u306f\u3001Ar\u3068F2\u3092\u6df7\u305c\u3066\u653e\u96fb\u3057\u3066\u3067\u304d\u308bArF*\u3068\u3044\u3046\u30a8\u30ad\u30b7\u30de\u30fc\u3092\u4f7f\u3044\u307e\u3059\u3002\u6614\u304b\u3089\u3042\u308bHeNe\u30ec\u30fc\u30b6\u30fc(633nm)\u3001HeCd\u30ec\u30fc\u30b6\u30fc(325nm)\u306a\u3069\u306f\u3053\u308c\u3068\u306f\u9055\u3044\u3001He\u306f\u653e\u96fb\u3067\u52b1\u8d77\u3055\u308c\u3066Ne\u3084Cd\u306e\u539f\u5b50\u306b\u30a8\u30cd\u30eb\u30ae\u30fc\u3092\u79fb\u3059\u5f79\u5272\u3067\u3059\u3002
\n\u5e0c\u30ac\u30b9\u304c\u52b1\u8d77\u72b6\u614b\u3067\u5316\u5b66\u7d50\u5408\u3092\u4f5c\u3063\u3066\u4f1a\u5408\u4f53\u306b\u306a\u308b\u306e\u306f\u9762\u767d\u3044\u3067\u3059\u306d\u3002
\nhttps:\/\/en.wikipedia.org\/wiki\/Excimer_laser<\/p>\n
\u6db2\u6d78\u3068\u3044\u3046\u306e\u306f\u3001\u5c48\u6298\u7387\u306e\u9ad8\u3044\u6db2\u4f53\u306e\u306a\u304b\u3067\u9732\u5149\u3092\u884c\u3046\u305f\u3081\u3067\u3059\u3002\u6db2\u4f53\u4e2d\u306e\u5149\u306e\u6ce2\u9577\u306f\u5c48\u6298\u7387\u306b\u53cd\u6bd4\u4f8b\u3059\u308b\u306e\u3067\u3001\u6ce2\u9577\u304c\u77ed\u304f\u306a\u308a\u307e\u3059\u3002\u9732\u5149\u306f\u3001\u30de\u30b9\u30af\u3092\u4f7f\u3063\u3066\u5149\u3092\u3042\u305f\u3089\u306a\u3044\u3068\u3053\u308d\u3068\u5f53\u305f\u308b\u3068\u3053\u308d\u3092\u4f5c\u308a\u307e\u3059\uff08\u73fe\u5728\u306f\u3001\u5e72\u6e09\u3082\u4f7f\u3063\u3066\u3044\u308b\uff09\u3002\u305d\u306e\u6642\u306e\u5149\u306e\u30dc\u30b1\u306f\u6ce2\u9577\u306b\u6bd4\u4f8b\u3057\u307e\u3059\u306e\u3067\u3001\u6ce2\u9577\u3092\u5c11\u3057\u3067\u3082\u77ed\u304f\u3059\u308b\u306e\u306f\u5c0f\u3055\u3044\u30d1\u30bf\u30fc\u30f3\u3092\u4f5c\u308b\u306e\u306b\u91cd\u8981\u3067\u3059\u3002\u73fe\u5728\u306e\u3068\u3053\u308d\u8d85\u7d14\u6c34(\u5c48\u6298\u73871.33)\u3092\u4f7f\u3063\u3066\u3044\u308b\u3068\u601d\u3044\u307e\u3059\u3002\u3082\u3063\u3068\u5c48\u6298\u7387\u304c\u5927\u304d\u3044\u6db2\u4f53\u3082\u3042\u308b\u306e\u3067\u3001\u5c06\u6765\u306f\u305d\u306e\u8d85\u9ad8\u7d14\u5ea6\u4f53\u306e\u4f9b\u7d66\u3082\u91cd\u8981\u306b\u306a\u308b\u304b\u3082\u3057\u308c\u307e\u305b\u3093\u3002<\/p>\n
\u5c48\u6298\u7387\u306e\u9ad8\u3044\u56fa\u4f53\u3092\u4f7f\u3046solid immersion\u3068\u3044\u3046\u65b9\u6cd5\u3082\u5206\u5149\u8a08\u6e2c\u3067\u306f\u4f7f\u308f\u308c\u307e\u3059\u304c\u3001\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u3067\u4f7f\u308f\u306a\u3044\u306e\u306f\u50b7\u3092\u5acc\u3046\u306e\u3068\u3001\u51b7\u5374\u52b9\u679c\u3082\u671f\u5f85\u3057\u3066\u3044\u308b\u306e\u3067\u306f\u306a\u3044\u3067\u3057\u3087\u3046\u304b<\/p>\n
\u6ce2\u9577\u304c\u9577\u3044\u5149\u3067\u3082\u3001\u8907\u96d1\u306a\u30de\u30b9\u30af\u3068\u7279\u6b8a\u306a\u30ec\u30b8\u30b9\u30c8\uff08\u611f\u5149\u306e\u95be\u5024\u304c\u3042\u308b\uff09\u3092\u7528\u610f\u3057\u3066\u5e72\u6e09\u3092\u4f7f\u3063\u3066\u9732\u5149\u3055\u305b\u3066\u7d30\u3044\u30d1\u30bf\u30fc\u30f3\u3092\u4f5c\u308c\u307e\u3059\u304c\u3001\u305d\u306e\u9593\u9694\u306f\u6ce2\u9577\u7a0b\u5ea6\u306a\u306e\u3067\u3001\u591a\u6570\u306e\u30de\u30b9\u30af\u3092\u4f7f\u308f\u306a\u3044\u3068\u56de\u8def\u304c\u4f5c\u308c\u307e\u305b\u3093\u3002\u4f5c\u308a\u305f\u3044\u30d1\u30bf\u30fc\u30f3\u7a0b\u5ea6\u306e\u6ce2\u9577\u306e\u5149\u3092\u4f7f\u3048\u3070\u3001\u305d\u306e\u624b\u9593\u304c\u3044\u3089\u306a\u3044\u306e\u3067\u4f4e\u30b3\u30b9\u30c8\u306b\u306a\u308a\u307e\u3059\u3002\u660e\u65e5\u306f\u305d\u306e\u305f\u3081\u306eEUV\u5149\u6e90\u306e\u8a71\u3092\u3057\u307e\u3059\u3002\u30ec\u30b8\u30b9\u30c8\u306f\u3001\u65e5\u672c\u304c\u5f97\u610f\u3068\u3059\u308b\u3068\u3053\u308d\u3067\u3059\u3002EUV\u7528\u306f\u3001\u3069\u3053\u304c\u30b7\u30a7\u30a2\u3092\u3068\u308b\u3067\u3057\u3087\u3046\u304b\u3002
\nhttps:\/\/www.tok.co.jp\/products\/semiconductor
\nhttps:\/\/www.chemicaldaily.co.jp\/%E4%BD%8F%E5%8F%8B%E5%8C%96%E5%AD%A6%E3%80%81%EF%BD%85%EF%BD%95%EF%BD%96%E3%83%AC%E3%82%B8%E3%82%B9%E3%83%88%E5%BC%B7%E5%8C%96%E3%80%81%E9%87%8F%E7%94%A3%E3%83%87%E3%83%90%E3%82%A4%E3%82%B9%E5%90%91\/<\/p>\n
immersion \u6d78\u6f2c
\ncome to terms \u5408\u610f\u306b\u9054\u3059\u308b
\nland\/strike\/make a deal \u4ea4\u6e09\u3092\u307e\u3068\u3081\u308b
\npurchase order \u6ce8\u6587\u66f8
\nprice per unit \u5358\u4fa1
\nestimate\u3000\u6982\u7b97\u898b\u7a4d\u66f8
\nquotation \u6700\u7d42\u7684\u306a\u898b\u7a4d\u66f8\uff08\u62d8\u675f\u529b\u304c\u3042\u308b\uff09 quote \u3068\u3082\u3044\u3046
\nquantity \u6570\u91cf
\nwillingness \u610f\u601d
\nconstraint \u62d8\u675f<\/p>\n
\u7269\u7406\u7528\u8a9e
\ndischarge \u653e\u96fb
\nThomson scattering \u30c8\u30e0\u30bd\u30f3\u6563\u4e71\uff08\u96fb\u5b50\u7b49\u306b\u5149\u304c\u5f53\u305f\u3063\u3066\u5149\u306e\u30a8\u30cd\u30eb\u30ae\u30fc\u304c\u5c11\u3057\u4f4e\u4e0b\u3057\u3066\u6563\u4e71\u3055\u308c\u308b\u3053\u3068\u3002\u901f\u5ea6\u7b49\u304c\u5206\u304b\u308b\u306e\u3067\u3001\u30d7\u30e9\u30ba\u30de\u8a3a\u65ad\u306b\u4f7f\u3046\uff09<\/p>\n","protected":false},"excerpt":{"rendered":"
ArF\u6db2\u6d78\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u306f\u3001ArF\u30ec\u30fc\u30b6\u30fc\u3092\u4f7f\u3063\u305f193nm\u306e\u7d2b\u5916\u7dda\u3092\u4f7f\u3063\u3066\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fc\u3057\u307e\u3059\u3002ArF\u30ec\u30fc\u30b6\u30fc\u306f\u30a8\u30ad\u30b7\u30de\u30fc\u30ec\u30fc\u30b6\u30fc\u306e\u4e00\u3064\u3067\u3059\u3002\u30a8\u30ad\u30b7\u30de\u30fcexcimer\u3068\u3044\u3046\u306e\u306f\u3001\u52b1\u8d77\u72b6\u614b\u3067\u5b89\u5b9a\u306a\u539f\u5b50\u3084\u5206\u5b50\u306e\u4f1a\u5408\u4f53\u3067\u3059\u3002ArF\u306e\u5834\u5408\u306f\u3001Ar\u3068F2\u3092\u6df7\u305c\u3066\u653e\u96fb\u3057\u3066\u3067\u304d\u308bArF*\u3068\u3044\u3046\u30a8\u30ad\u30b7\u30de\u30fc\u3092\u4f7f\u3044\u307e\u3059\u3002\u6614\u304b\u3089\u3042\u308bHeNe\u30ec\u30fc\u30b6\u30fc(633nm)\u3001HeCd\u30ec\u30fc\u30b6\u30fc(325nm)\u306a\u3069\u306f\u3053\u308c\u3068\u306f\u9055\u3044\u3001He\u306f\u653e\u96fb\u3067\u52b1\u8d77\u3055\u308c\u3066Ne\u3084Cd\u306e\u539f\u5b50\u306b\u30a8\u30cd\u30eb\u30ae\u30fc\u3092\u79fb\u3059\u5f79\u5272\u3067\u3059\u3002 \u5e0c\u30ac\u30b9\u304c\u52b1\u8d77\u72b6\u614b\u3067\u5316\u5b66\u7d50\u5408\u3092\u4f5c\u3063\u3066\u4f1a\u5408\u4f53\u306b\u306a\u308b\u306e\u306f\u9762\u767d\u3044\u3067\u3059\u306d\u3002 https:\/\/en.wikipedia.org\/wiki\/Excime…<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"om_disable_all_campaigns":false,"_monsterinsights_skip_tracking":false,"_monsterinsights_sitenote_active":false,"_monsterinsights_sitenote_note":"","_monsterinsights_sitenote_category":0,"footnotes":""},"categories":[43,42],"tags":[6,5],"class_list":["post-1115","post","type-post","status-publish","format-standard","hentry","category-companies","category-tech","tag-companies","tag-tech"],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/www.sekaiken.com\/index.php?rest_route=\/wp\/v2\/posts\/1115","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.sekaiken.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.sekaiken.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.sekaiken.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.sekaiken.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=1115"}],"version-history":[{"count":0,"href":"https:\/\/www.sekaiken.com\/index.php?rest_route=\/wp\/v2\/posts\/1115\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.sekaiken.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=1115"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.sekaiken.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=1115"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.sekaiken.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=1115"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}